Martin Magnusson
deputy head of department
Aerotaxy: High throughput gas-phase epitaxy of nanostructures
Author
Summary, in English
Aerotaxy is an aerosol-based growth method for semiconductors and we present in detail how aerotaxy can be used to grow nanowires continuously with controlled nanoscale dimensions, with a high degree of crystallinity and remarkable throughput, including process details and our current understading of the growth processes. Catalytic size-selected Au aerosol particles travel through a heated flow-through reactor and mix with III–V precursor flux, which nucleates the growth of nanowires. We demonstrate that the method allows sensitive and reproducible control of the nanowire dimensions and shape. The reported continuous and potentially high-throughput method is expected to substantially reduce the cost of producing high-quality nanowires and may enable the low-cost fabrication of nanowire-based devices on an industrial scale.
Department/s
- Solid State Physics
- NanoLund: Centre for Nanoscience
- Centre for Analysis and Synthesis
- Department of Physics
- Engineering Physics (M.Sc.Eng.)
Publishing year
2020-08-31
Language
Swedish
Document type
Conference paper: abstract
Topic
- Nano Technology
- Other Physics Topics
Conference name
European Aerosol Conference 2020
Conference date
2020-08-31 - 2020-09-04
Conference place
Aachen, Germany
Status
Published