Martin Magnusson
deputy head of department
Fabrication of Si-based nanoimprint stamps with sub-20 nm features
Author
Summary, in English
Department/s
- Solid State Physics
Publishing year
2002
Language
English
Pages
449-454
Publication/Series
MICROELECTRONIC ENGINEERING
Volume
61-2
Document type
Conference paper
Publisher
Elsevier
Topic
- Condensed Matter Physics
Keywords
- aerosols
- electron beam lithography
- nanoimprint
- etching
Conference name
Micro and Nano Engineering 2001
Conference date
2001-09-16 - 2001-09-19
Status
Published
ISBN/ISSN/Other
- ISSN: 1873-5568
- ISSN: 0167-9317