Aerotaxy: High throughput gas-phase epitaxy of nanostructures

Summary, in English

Aerotaxy is an aerosol-based growth method for semiconductors and we present in detail how aerotaxy can be used to grow nanowires continuously with controlled nanoscale dimensions, with a high degree of crystallinity and remarkable throughput, including process details and our current understading of the growth processes. Catalytic size-selected Au aerosol particles travel through a heated flow-through reactor and mix with III–V precursor flux, which nucleates the growth of nanowires. We demonstrate that the method allows sensitive and reproducible control of the nanowire dimensions and shape. The reported continuous and potentially high-throughput method is expected to substantially reduce the cost of producing high-quality nanowires and may enable the low-cost fabrication of nanowire-based devices on an industrial scale.

• Författare: Knut Deppert; Sudhakar Sivakumar; Axel Persson; Wondwosen Metaferia; Reine Wallenberg; Magnus Heurlin; Lars Samuelson; Jonas Johansson; Martin H. Magnusson
• Avdelning/ar: Fasta tillståndets fysik; NanoLund: Centre for Nanoscience; Centrum för analys och syntes; Fysiska institutionen; Teknisk fysik (CI)
• Publiceringsår: 2020-08-31
• Språk: Svenska
• Dokumenttyp: Konferensbidrag: abstract
• Ämne: Nano Technology; Other Physics Topics
• Conference name: European Aerosol Conference 2020
• Conference date: 2020-08-31 - 2020-09-04
• Conference place: Aachen, Germany
• Status: Published